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Volumn 14, Issue 12, 2003, Pages 2121-2126

High-accuracy optical measurement of flatness for large objects

Author keywords

Laser sensor; Non destructive testing; Shape measurement

Indexed keywords

CHARGE COUPLED DEVICES; GANTRY CRANES; RANGE FINDERS; SEMICONDUCTOR LASERS; SURFACE PROPERTIES;

EID: 0346911480     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/14/12/011     Document Type: Article
Times cited : (8)

References (13)
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  • 3
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    • (1993) Opt. Eng. , vol.32 , pp. 1668-1674
    • Yoshizawa, T.1
  • 7
    • 0033892087 scopus 로고    scopus 로고
    • Optimisation of a shape measurement system based on spatial light modulators
    • Coggrave C R and Huntley J M 2000 Optimisation of a shape measurement system based on spatial light modulators Opt. Eng. 39 91-8
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    • Coggrave, C.R.1    Huntley, J.M.2
  • 8
    • 0347112776 scopus 로고    scopus 로고
    • A novel laser datum system for nanometric profilometry for large optical surfaces
    • Yang H S, Kim S W and Walker D D 2003 A novel laser datum system for nanometric profilometry for large optical surfaces Opt. Express 11 624-31
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    • Yang, H.S.1    Kim, S.W.2    Walker, D.D.3
  • 9
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    • (1997) Meas. Sci. Technol. , vol.8 , pp. 837-848
    • Chan, F.M.M.1    Davis, E.J.2    King, T.G.3    Stout, K.J.4
  • 10
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    • Design of a long-trace surface profiler
    • Takacs P Z, Qian S N and Colbert J 1987 Design of a long-trace surface profiler Proc. SPIE 749 59-64
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  • 11
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    • Design of an optical probe for surface profile measurement
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    • Calibration of a laser reference plane for large-scale dimensional flatness measurement
    • Aketagawa M, Takada K and Kon H 1998 Calibration of a laser reference plane for large-scale dimensional flatness measurement Meas. Sci. Technol. 9 1115-9
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.