Novel laser datum system for nanometric profilometry for large optical surfaces

Optics Express

Volumn 11, Issue 6, 2003, Pages 624-631

  Yang, Ho Soon ^a   Kim, Sug Whan ^b   Walker, David ^c  

^a SaTReC Initiative CoLtd 18F Sahak Bldg   (South Korea)

^b Yonsei University   (South Korea)

^c UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; CROSSTALK; HYSTERESIS; LASERS; MIRRORS; PHOTODIODES; SENSORS; SURFACE MEASUREMENT; TELESCOPES;

LASER DATUM SYSTEMS; OPTICAL SURFACES; QUADRANT DETECTORS;

OPTICAL MATERIALS;

EID: 0347112776     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OE.11.000624     Document Type: Article

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