Growth Behavior of Epitaxial MgO Films on Si(001) by Pulsed Laser Deposition

Key Engineering Materials

Volumn 253, Issue , 2003, Pages 119-128

  Yamada, Tomoaki ^a   Wakiya, Naoki ^a   Shinozaki, Kazuo ^a   Mizutani, Nobuyasu ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Epitaxial Growth; MgO; PLD; RHEED; Si

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; EPITAXIAL GROWTH; PULSED LASER DEPOSITION; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SILICON; SUBSTRATES; THERMODYNAMICS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EPITAXIAL FILMS; THERMODYNAMIC REACTION;

MAGNESIA;

EID: 0346885654     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

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