Influence of diborane on the growth rate and phase stability of diamond films

Carbon

Volumn 37, Issue 1, 1999, Pages 107-111

  Gheeraert, E ^a   Deneuville, A ^a   Mambou, J ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; BORON COMPOUNDS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; EPITAXIAL GROWTH; FILM GROWTH; POLYCRYSTALLINE MATERIALS;

DIBORANE;

DIAMOND FILMS;

EID: 0032785093     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(98)00192-4     Document Type: Article

References (12)

1. Nishimura K, Das K, Glass JT. J. Appl. Phys. 1991;69:3142.
2. Gheeraert E, Gonon P, Deneuville A, Abello L, Lucazeau G. Diamond Relat. Mater. 1993;2:742.
3. Werner M, Dorsch O, Baerwind HU, Ersoy A, Obermaier E, Johnston C, Romani S, Chalker PR, Moore V, Buckley-Golder IM. Diamond Relat. Mater. 1994;3:983.
4. Miyata K, Kumagai K, Nishimura K, Kobashi K. J. Mater. Res. 1993;8:2845.
5. Cifre J, Puigdollers J, Polo MC, Esteve J. Diamond Relat. Mater. 1994;3:628.
6. Gonon P, Gheeraert E, Deneuville A, Fontaine F, Abello L, Lucazeau G. J. Appl. Phys. 1995;78:7059.
7. Locher R, Wagner J, Fuchs F, Maier M, Gonon P, Koidl P. Diamond Relat. Mater. 1995;4:678.
8. Spicka H, Griesser M, Hutter H, Grasserbauer M, Bohr S, Haubner R, Lux B. Diamond Relat. Mater. 1996;5:383.
9. Zhang RJ, Lee ST, Lam YW. Diamond Relat. Mater. 1996;5:1288.
10. Wurzinger P, Pongratz P, Hartmann P, Haubner R, Lux B. Diamond Relat. Mater. 1997;6:763.
11. Gonon P, Deneuville A, Fontaine F, Gheeraert E, Campargue A, Chenevier M, Rodolphe S. J. Appl. Phys. 1995;78:7404.
12. Wild C, Khol R, Herres N, Muller-Sebert W, Koidl P. Diamond Relat. Mater. 1994;3:373.