Variations of morphology and electrical property of diamond with doping using diborane in a methane-hydrogen gas mixture

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 251-256

  Lee, Bum Joo ^a,b   Ahn, Byung Tae ^b   Baik, Young Joon ^a  

^a Korea Institute Science/Technology   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Diamond; Diborane; Electrical properties; Morphology

Indexed keywords

BORON COMPOUNDS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; CRYSTAL ORIENTATION; DIAMOND FILMS; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY OF SOLIDS; MATHEMATICAL MODELS; MICROWAVES; MORPHOLOGY; PARTICLES (PARTICULATE MATTER); PLASMA APPLICATIONS;

CHARGE POLARITY MODEL; DIBORANE; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (MPCVD);

DIAMONDS;

EID: 0040368662     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00384-7     Document Type: Article

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