Dry Etching of Copper Using Chlorine: A Review

Russian Microelectronics

Volumn 31, Issue 3, 2002, Pages 179-192

  Efremov, A M ^a   Svettsov, V I ^a  

^a IVANOVO STATE UNIVERSITY OF CHEMISTRY AND TECHNOLOGY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346388458     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1015463004089     Document Type: Article

References (46)

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