Copper gettering by aluminum precipitates in aluminum-implanted silicon

Journal of Applied Physics

Volumn 89, Issue 8, 2001, Pages 4269-4274

  Petersen, G A ^a,b   Myers, S M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346347490     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1353557     Document Type: Article

References (21)

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