Quo Vadis total reflection X-ray fluorescence?

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 58, Issue 12, 2003, Pages 2025-2038

  Pahlke, Siegfried ^a,b  

^a SILTRONIC AG   (Germany)

^b NONE   (Germany)

Author keywords

Silicon drift detector SDD; Solid state detector SSD; Synchrotron Total X ray fluorescence SR TXRF; Total X ray fluorescence TXRF; Vapor phase decomposition VPD; Wafer surface measuring system WSMS; Wafer surface preparation system WSPS

Indexed keywords

ARRAYS; DETECTORS; FLUORESCENCE; MONITORING; SEMICONDUCTOR DIODES; SILICON WAFERS; SOLID STATE DEVICES; TRACE ANALYSIS; X RAY SPECTROSCOPY;

SILICON DRIFT DETECTORS (SDD); VAPOR PHASE DECOMPOSITION (VPD); WAFER SURFACE MEASURING SYSTEMS (WSMS);

SEMICONDUCTOR DEVICES;

EID: 0346331015     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(03)00193-9     Document Type: Conference Paper

References (20)

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