XPS and electroluminescence studies on SrS1-xSex and ZnS1-xSex thin films deposited by atomic layer deposition technique

Journal of Crystal Growth

Volumn 260, Issue 3-4, 2004, Pages 440-446

  Ihanus, Jarkko ^a   Lambers, Eric ^b   Holloway, Paul H ^b   Ritala, Mikko ^a   Leskelä, Markku ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

^b UNIVERSITY OF FLORIDA   (United States)

Author keywords

A1. Solid solutions; A1. X ray photoelectron spectroscopy; A3. Atomic layer deposition; B1. Sulfides; B2. Phosphors; B3. Electroluminescent devices

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); ELECTROLUMINESCENCE; ELECTRON BEAMS; ENERGY DISPERSIVE SPECTROSCOPY; EVAPORATION; FREQUENCIES; GLASS TRANSITION; HYDROGEN SULFIDE; OXIDATION; SELENIUM COMPOUNDS; SOLID SOLUTIONS; SUBSTITUTION REACTIONS; X RAY PHOTOELECTRON SPECTROSCOPY; X RAY SPECTROPHOTOMETERS; ZINC SULFIDE;

ATOMIC LAYER DEPOSITION (ALD); EMISSION BANDS; EMISSION COLORS; GASEOUS REACTANTS;

THIN FILMS;

EID: 0346317419     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2003.08.046     Document Type: Article

References (25)

1. Leskelä M., Li W.-M., Ritala M. Müller G. Electroluminescence II. Semiconductors, Semimetals. Vol. 65:1999;107 Academic Press, New York.
2. Poelman D., Vercaemst R., Van Meirhaeghe R.L., Laflère W.H., Cardon F. J. Lumin. 65:1995;7.
3. Yang H., Park Y.K., Ju S.H., Chang B.H. Appl. Phys. Lett. 67:1995;70.
4. Yamashita N., Michitsuji Y., Asano S. J. Electrochem. Soc. 134:1987;2932.
5. Yamashita N., Harada O., Nakamura K. Jpn. J. Appl. Phys. 34:1995;5539.
6. Poelman D., Wauters D., Van Meirhaeghe R.L., Cardon F. Solid State Commun. 113:2000;405.
7. Miura N., Ogawa K., Kobayashi S., Matsumoto H., Nakano R. J. Crystal Growth. 138:1994;1046.
8. Krasnov A.N. Appl. Phys. Lett. 78:2001;3223.
9. Ritala M., Leskelä M. Nalwa H.S. Handbook of Thin Film Materials. Vol. 1:2002;103 Academic Press, New York.
10. Ihanus J., Ritala M., Leskelä M., Rauhala E. Appl. Surf. Sci. 112:1997;154.
11. Ihanus J., Ritala M., Leskelä M. Electrochem. Soc. Proc. 97-25:1997;1423.
12. HSC Chemistry for Windows, Ver. 5.11, Outokumpu Research Oy, Pori, Finland, 2002.
13. Sanders B.W., Kitai A. Chem. Mater. 4:1992;1005.
14. Ikeda H., Miura Y., Takahashi N., Koukitu A., Seki H. Appl. Surf. Sci. 82/83:1994;257.
15. Taki T., Nakajima T., Koukitu A., Seki H. J. Crystal Growth. 183:1998;75.
16. Ylilammi M., Ranta-aho T. Thin Solid Films. 232:1993;56.
17. J.F. Moulder, W.F. Stickle, P.E. Sobol, K.D. Bomben, in: J. Chastain, R.C. King Jr. (Eds.), Handbook of X-ray Photoelectron Spectroscopy, Physical Electronics Corp., Eden Prairie, MN, USA, 1995.
18. Heikkinen H., Johansson L.-S., Nykänen E., Niinistö L. Appl. Surf. Sci. 133:1998;205.
19. Vdovenkova T., Vdovenkov A., Soininen E. Surf. Sci. 454-456:2000;529.
20. Ihanus J., Hänninen T., Hatanpää T., Aaltonen T., Mutikainen I., Sajavaara T., Keinonen J., Ritala M., Leskelä M. Chem. Mater. 14:2002;1937.
21. Li W.-M., Ritala M., Leskelä M., Lappalainen R., Jokinen J., Soininen E., Hüttl B., Nykänen E., Niinistö L. J. Appl. Phys. 84:1998;1029.
22. Ihanus J., Ritala M., Leskelä M., Soininen E., Park W., Kaloyeros A.-E., Harris W., Barth K.W., Topol A.W., Sajavaara T., Keinonen J. J. Appl. Phys. 94:2003;3862.
23. Oseto S., Kageyama Y., Takahashi M., Deguchi H., Kameyama K., Fujimura I. Shionoya S., Kobayashi H. Electroluminescence, Springer Proceedings in Physics. Vol. 38:1989;191 Springer, Berlin.
24. Mauch R.H., Velthaus K.O., Bilger G., Schock H.W. J. Crystal Growth. 117:1992;964.
25. Mach R., von Kalben J., Gericke W., Müller G.O., Reinsperger G.U. Phys. Stat. Sol. (A). 75:1983;489.