Combinatorial study of reactively sputtered Cr-Ti-N

Applied Surface Science

Volumn 223, Issue 1-3, 2004, Pages 253-258

  Teplin, C W ^a   Van Hest, M F A M ^a   Dabney, M ^a   Perkins, C L ^a   Gedvillas, L M ^a   To, B ^a   Parilla, P A ^a   Keyes, B M ^a   Perkins, J D ^a   Ginley, D S ^a   Lin, Yuping ^b   Lu, Yiwei ^b  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

^b KOCH INDUSTRIES INC   (United States)

Author keywords

Combinatorial; CrN; Dc sputtering; TiN

Indexed keywords

CHROMIUM ALLOYS; COMPOSITION; CORROSION; ELECTROMAGNETIC WAVE REFLECTION; GROWTH (MATERIALS); HEAT RESISTANCE; INFRARED RADIATION; LIGHT TRANSMISSION; OPTICAL COATINGS; OXIDATION; REFRACTIVE INDEX; SPUTTERING; ULTRAVIOLET RADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON MICROPROBE ANALYSIS (EMPA);

TERNARY SYSTEMS;

EID: 0345763264     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00927-9     Document Type: Article

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