Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4956, Issue , 2003, Pages 139-146

  Zara, J M ^a   Yazdanfar, S ^b   Rao, K D ^b   Izatt, J A ^b   Smith, S W ^b  

^a George Washington University   (United States)

^b Duke University   (United States)

Author keywords

Electrostatic actuator; Endoscopic probe; MEMS; OCT; Scanning arm

Indexed keywords

CAPACITORS; ELECTROSTATIC ACTUATORS; ENDOSCOPY; INTEGRATED OPTOELECTRONICS; MICROELECTROMECHANICAL DEVICES; MIRRORS; NATURAL FREQUENCIES; PHOTOLITHOGRAPHY; POLYIMIDES; SILICON WAFERS; TISSUE; TOMOGRAPHY;

ELECTROSTATIC MICROMACHINE ACTUATOR; ENDOSCOPIC PROBE; INTEGRATED FORCE ARRAY; OPTICAL COHERENCE TOMOGRAPHY; SCANNING ARM;

IMAGING TECHNIQUES;

EID: 0345725005     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.479037     Document Type: Conference Paper

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