Direct patterning of electro-deposited polythiophene thin films by ultraviolet laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3183, Issue , 1997, Pages 57-65

  Hu, X ^a   Wong, T K S ^a   Gao, S ^a   Liu, H M ^a   Lam, Y L ^a   Chan, Y C ^a   Xu, F L ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Conjugated polymers; Laser ablation; Microlithography; Micromachining; Polythiophene

Indexed keywords

CADMIUM; COMPOSITE MICROMECHANICS; CONJUGATED POLYMERS; FABRICATION; HELIUM; LASER ABLATION; LASER APPLICATIONS; LASERS; MACHINING; MICROMACHINING; PHOTORESISTS; POLYMER FILMS; POLYMERS; PULSED LASER DEPOSITION; SULFUR COMPOUNDS;

DEVICE STRUCTURES; DIRECT-WRITE; DUAL FUNCTIONS; ELECTROCHEMICAL POLYMERISATION; ELECTRONIC DEVICES; INCIDENT POWERS; LITHOGRAPHY SYSTEMS; MICROLITHOGRAPHY; PATTERNING PROCESSES; POLYTHIOPHENE; POLYTHIOPHENE FILMS; ULTRAVIOLET LASER ABLATIONS;

ABLATION;

EID: 0345594013     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.280552     Document Type: Conference Paper

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