Microstructure of radio frequency sputtered Ag1-xSix alloys

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2202-2206

  Leedy, K D ^a   Rigsbee, J M ^a,b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Alabama at Birmingham   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; COMPOSITION EFFECTS; GRAIN SIZE AND SHAPE; MICROSTRUCTURE; PHASE TRANSITIONS; SPUTTER DEPOSITION; THICK FILMS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VACUUM; X RAY DIFFRACTION;

DARK FIELD MICROGRAPHS; LIQUID NITROGEN COOLED SUBSTRATE HOLDERS; METASTABLE PHASE; RADIOFREQUENCY SPUTTER DEPOSITION; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SELECTED AREA DIFFRACTION RING PATTERNS; SILVER SILICIDE;

SILVER ALLOYS;

EID: 0030193585     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580047     Document Type: Article

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