Mechanical properties of TiN nano-film deposited by plasma immersion ion implantation and deposition

Wuji Cailiao Xuebao/Journal of Inorganic Materials

Volumn 18, Issue 4, 2003, Pages 904-910

  Wan, Guo Jiang ^a   Huang, Nan ^a   Leng, Yong Xiang ^a   Yang, Ping ^a   Chen, Jun Ying ^a  

^a SOUTHWEST JIAOTONG UNIVERSITY   (China)

Author keywords

Mechanical property; Nano structured film; Plasma immersion ion implantation and deposition; Titanium nitride

Indexed keywords

CRYSTAL MICROSTRUCTURE; DEPOSITION; ION IMPLANTATION; MECHANICAL PROPERTIES; PLASMA APPLICATIONS; THIN FILMS; TITANIUM NITRIDE;

NANO CRYSTAL STRUCTURE; NANO FILMS; NANO INDENTATION TEST; PLASMA IMMERSION ION IMPLANTATION; SCRATCH TEST; TENSION TEST;

NANOSTRUCTURED MATERIALS;

EID: 0345547624     PISSN: 1000324X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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