Optical beam induced resistance change (OBIRCH): Overview and recent results

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 2, Issue , 2003, Pages 742-743

  Nikawa, K ^a  

^a RENESAS TECHNOLOGY CORP   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FAILURE ANALYSIS; IMAGE QUALITY; LIGHT MODULATION; OPTICAL BEAM SPLITTERS; PHOTOCURRENTS; SEEBECK EFFECT;

DEFECT DETECTION; OPTICAL BEAM INDUCED RESISTANCE CHANGE;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0345447623     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)

1. Cole, E. I., et al., Int'l Reliab. Phys. Symposium, IEEE, USA, pp. 129-136 (1998).
2. Kawamura, N., et al., IEICE Trans. Electron. E77-C, p.579 (1994).
3. Koyama, T., et al., Int'l Reliab. Phys. Symposium, IEEE, USA, pp.228-233 (1995).
4. Koyama, T., et al., Int'l Reliab. Phys. Symposium, IEEE, USA, pp.529-535 (2003).
5. Morimoto, K., et al., LSI Testing Symposium, Osaka, Japan, pp.223-228 (1999).
6. Morimoto, K., et al., LSI Testing Symposium, Osaka, Japan, pp.223-228 (2000).
7. Namura, T., et al., LSI Testing Symposium, Osaka, Japan, pp.193-197 (2001).
8. Nikawa, K. and Tozaki, S., Int'l Symp. Testing and Failure Analysis, Los Angeles, USA, pp.303-310 (1993).
9. Nikawa, K. et al., Int'l Symposium Testing and Failure Analysis, USA, pp.11-16 (1994).
10. Nikawa, K. et al., Jpn. J. Appl. Phys. vol.34, part 1, no.5A, pp.2260-2265 (1995a).
11. Nikawa, K. et al., European Symp. Reliab. Electron device Failure phys. and analysis, pp. 307-312 (1995b).
12. Nikawa, K. and Inoue, S., Int'l Reliab. Phys. Symposium, IEEE, Dallas, USA, pp.346-354 (1996).
13. Nikawa, K. and Inoue, S., Asian Test Symposium, IEEE, Akita, Japan, pp.214-219 (1997).
14. Nikawa, K. et al., LSI Testing Symposium, Osaka, Japan, pp.181-186 (1998).
15. Nikawa, K, et al., Appl. Phys. Lett., vol.74, no.7, pp.1048-1050 (1999).
16. Tagami, M. et al., LSI Testing Symposium, Osaka, Japan, pp.269-274 (2002).
17. Wen, W., and Clarke, D.R., Appl. Phys. Lett., vol. 72, no.15, pp. 1920-1922 (1998).
18. Yokogawa, S, et al., Microelectronics Reliability 41, pp. 1409-1416 (2001).
19. Yokogawa, S., et al., RCJ Reliability Symposium, Tokyo, Japan, pp. 51-58 (2002).