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Volumn 144-145, Issue , 1999, Pages 255-259
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Spectromicroscopy of suicide phases formed at Ni/Si interfaces
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Author keywords
Nickel; Nickel suicide phases; Scanning photoelectron microscopy; Silicon
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Indexed keywords
COMPOSITION;
ELECTRON ENERGY LEVELS;
MOLECULAR ORIENTATION;
NICKEL;
OPTICAL RESOLVING POWER;
PHOTOELECTRON SPECTROSCOPY;
SILICON;
SILICON COMPOUNDS;
SYNCHROTRON RADIATION;
TEMPERATURE;
NICKEL SOLVUS LINE;
SCANNING PHOTOELECTRON MICROSCOPY;
SILICIDE PHASES;
SPATIAL DISTRIBUTION;
SPATIAL RESOLUTION;
SPECTROMICROSCOPY;
INTERFACES (MATERIALS);
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EID: 0345073112
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(98)00807-1 Document Type: Article |
Times cited : (5)
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References (14)
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