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Volumn 58, Issue 1, 1999, Pages 167-170
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C-H complex in Si observed at low temperatures
a a,b a |
Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION SPECTROSCOPY;
ANNEALING;
CARBON;
CRYSTAL IMPURITIES;
CRYSTALLINE MATERIALS;
HYDROGEN;
HYDROGEN BONDS;
INFRARED SPECTROSCOPY;
MOLECULAR VIBRATIONS;
POINT DEFECTS;
PROTONS;
PROTON IMPLANTATION;
SEMICONDUCTING SILICON;
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EID: 0345072504
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(98)00294-3 Document Type: Article |
Times cited : (7)
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References (10)
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