Transmission electron microscopy study of damaged layer on GaAs surface induced by low-energy ion irradiation

Journal of Applied Physics

Volumn 94, Issue 10, 2003, Pages 6372-6375

  Kato, J ^a   Nagatomi, T ^a   Takai, Y ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRON DIFFRACTION; ION BEAMS; IRRADIATION; OXIDATION; SCANNING ELECTRON MICROSCOPY; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY;

DAMAGED LAYERS; INCIDENT ANGLES; SPUTTER DEPTH PROFILING;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0344946317     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1619191     Document Type: Article

References (8)

1. M. G. Dowsett, N. S. Smith, R. Bridgeland, D. Richards, A. C. Lovejoy, and P. Pedrick, in Proceedings of the Tenth International Conference on Secondary Ion Mass Spectrometry (SIMS-X), edited by A. Benninghoven, B. Hagenhoff, and H. W. Werner (Wiley, Chichester, UK, 1997), pp. 367-370.
2. N. S. Smith, M. G. Dowsett, B. McGregor and P. Phillips, in Ref. 1, pp. 363-366.
3. Y. Mizuhara, J. Kato, T. Nagatomi, Y. Takai, T. Aoyama, A. Yoshimoto, M. Inoue, and R. Shimizu, Surf. Interface Anal. 35, 382 (2003).
4. S. Hofmann, Surf. Interface Anal. 21, 673 (1994).
5. http://www.sasj.gr.jp/STD/CRM5201-a/english-pamphlet.html.
6. T. Matsutani, K. Iwamoto, T. Nagatomi, Y. Kimura, Y. Takai, R. Shimizu, R. Aihara, and Y. Sakuma, J. Vac. Soc. Jpn. 43, 1126 (2000).
7. T. Matsutani, K. Iwamoto, T. Nagatomi, Y. Kimura, Y. Takai, R. Shimizu, R. Aihara, and Y. Sakuma, J. Surf. Anal. 7, 314 (2000).
8. T. Matsutani, K. Iwamoto, T. Nagatomi, Y. Kimura, and Y. Takai, Jpn. J. Appl. Phys., Part 2 40, L481 (2001).