Fabrication of alloy and ceramic microstructures by LIGA-MA-SPS process

Sensors and Actuators, A: Physical

Volumn 108, Issue 1-3, 2003, Pages 250-257

  Miyano, Naoki ^a,c   Tagaya, Kazunori ^b,d   Kawase, Kazunori ^b,e   Ameyama, Kei ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

^c KYUSHU UNIVERSITY   (Japan)

^d SEIKO EPSON CORPORATION   (Japan)

^e Sumitomo Electric   (Japan)

Author keywords

LIGA; Mechanical alloying; Molding; Shape memory alloy; SPS

Indexed keywords

COMMINUTION; COMPOUNDING (CHEMICAL); ELECTROFORMING; INJECTION MOLDING; MECHANICAL ALLOYING; MICROSTRUCTURE; POLYMETHYL METHACRYLATES; POWDERS; SHAPE MEMORY EFFECT; SILICON WAFERS; SINTERING; SURFACE ROUGHNESS; SYNCHROTRON RADIATION; VICKERS HARDNESS TESTING; X RAY DIFFRACTION ANALYSIS; X RAY LITHOGRAPHY;

SPARK PLASMA SINTERING (SPS); TRANSFERABILITY;

CERAMIC MATERIALS;

EID: 0344945407     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00367-4     Document Type: Conference Paper

References (8)

1. P. Bley, J. Mohr, The LIGA process - a microfabrication technology, FED J. 5 (Suppl. 1) (1994) 34-48.
2. W. Ehrfeld, H. Lehr, Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics, Radiat. Phys. Chem. 45 (1995) 349-365.
3. W. Ehrfeld, V. Hessel, H. Lowe, C.H. Schulz, L. Weber, Materials of LIGA technology, Microsyst. Technol. 5 (1999) 105-112.
4. C. Yoshimura, Y. Kobayashi, H. Aoki, H. Ueno, S. Sugiyama, Development of plastic injection molding using the LIGA process, Memoirs of the SR Center, Ritsumeikan University, April 2000, pp. 67-83.
5. S. Sugimoto, S. Tanaka, J.-F. Li, R. Watanabe, M. Esashi, Silicon carbide microreaction-sintering using a multilayer silicon mold, MEMS 2000 (2000) 775-780.
6. Y. Liu, L.-A. Liew, R. Luo, L. An, V.M. Bright, M.L. Dunn, J.W. Daily, R. Raj, Fabrication of SiCN MEMS structures using microforged molds, IEEE (2000) 118-121.
7. J.S. Benjamin, Dispersion strengthened superalloys by mechanical alloying, Met. Trans. 1 (1970) 1221-1225.
8. S. Sugiyama, Y. Zhang, H. Ueno, M. Hosaka, T. Fujimoto, R. Maeda, T. Tanaka, A compact SR beamline for fabrication of high aspect ratio MEMS microparts, MHS 96 (1996) 79-84.