Fabrication of SiCN MEMS structures using microforged molds

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 118-121

  Liu, Y ^a   Liew, L A ^a   Luo, R ^a   An, L ^a   Bright, V M ^a   Dunn, M L ^a   Daily, J W ^a   Raj, R ^a  

^a University of Colorado at Boulder   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; FABRICATION; POLYMERS; SHRINKAGE; SILICON COMPOUNDS; THERMAL EFFECTS;

POLYMER PRECURSORS;

CERAMIC MATERIALS;

EID: 0034998559     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)