Compact SR beamline for fabrication of high aspect ratio MEMS microparts

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1996, Pages 79-84

  Sugiyama, S ^a   Zhang, Y ^a   Ueno, H ^a   Hosaka, M ^a   Fujimoto, T ^a   Maeda, R ^a   Tanaka, T ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COMPUTER AIDED MANUFACTURING; ELECTROFORMING; INTEGRATED CIRCUIT MANUFACTURE; MICROSTRUCTURE; NICKEL; PERSONAL COMPUTERS; PHOTONS; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY;

BEAMLINE; MICROPARTS; NICKEL ELECTROFORMING; SYNCHROTRON RADIATION EQUIPMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0030389395     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)