Ferroelectric PLZT thin films deposited by RF triode magnetron sputtering for spatial light modulators

IEEE International Symposium on Applications of Ferroelectrics

Volumn 2, Issue , 1996, Pages 675-678

  Tunaboylu, Bahadir ^a   Harvey, Phillip C ^a   Deng, Fei ^a   Fan, Chi ^a   Esener, Sadik ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; LIGHT MODULATORS; MAGNETRON SPUTTERING; PEROVSKITE; PHASE COMPOSITION; PHASE TRANSITIONS; PLATINUM; SAPPHIRE; SILICON WAFERS; SPUTTER DEPOSITION;

LEAD LANTHANUM ZIRCONATE TITANATE; PYROCHLORE; SPATIAL LIGHT MODULATORS;

DIELECTRIC FILMS;

EID: 0030363807     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)