Influence of annealing treatment on the ferroelectric and piezoelectric properties of PZT thin films grown on silicon substrates by sputtering

IEEE International Symposium on Applications of Ferroelectrics

Volumn 1, Issue , 1996, Pages 503-506

  Velu, G ^a   Remiens, D ^a   Tronc, P ^a   Cattan, E ^a   Thierry, B ^a  

^a LAMAC/CRITT Universite de   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; FERROELECTRIC MATERIALS; FILM GROWTH; MICROSTRUCTURE; PEROVSKITE; PIEZOELECTRIC MATERIALS; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTING SILICON; SPUTTERING; SUBSTRATES;

EMBEDDED BEAM METHOD; LEAD ZIRCONATE TITANATE (PZT);

THIN FILMS;

EID: 0030360961     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)