Subnanometric calibration of a differential interferometer

Precision Engineering

Volumn 19, Issue 2-3, 1996, Pages 187-197

  Kiyono, Satoshi ^a   Ge, Zongtao ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Comparison calibration; Differential interferometer; Displacement measurement; Fringe counting; Fringe interpolation; Linearity error; Phase modulation; Self calibration; Sensor calibration

Indexed keywords

CALIBRATION; ERROR CORRECTION; INTERPOLATION; NANOTECHNOLOGY; PHASE MODULATION;

DIFFERENTIAL INTERFEROMETER; DISPLACEMENT MEASUREMENT; FRINGE COUNTING; SELF-CALIBRATION; SENSOR CALIBRATION;

INTERFEROMETERS;

EID: 0030260246     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0141-6359(96)00007-4     Document Type: Article

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