The structural nature of SiO2/Ta2O5 multilayers on Si(100) formed by ion-beam sputter deposition

Journal of Physics D: Applied Physics

Volumn 30, Issue 15, 1997, Pages 2143-2146

  Kojima, Isao ^a   Li, Boquan ^a,c   Fujimoto, Toshiyuki ^a   Kim, Kyung Joong ^b   Moon, Dae Won ^b  

^a NATL INST OF MAT AND CHEM RES   (Japan)

^b Korea Research Institute of Standards and Science   (South Korea)

^c UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344457656     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/30/15/004     Document Type: Article

References (11)

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