A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique

Scanning

Volumn 20, Issue 5, 1998, Pages 357-368

  Ong, K H ^a   Phang, J C H ^a   Thong, J T L ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Astigmatism correction; Automation; Focusing; Fourier transform; Scanning electron microscopy

Indexed keywords

ALGORITHM; ARTICLE; AUTOMATION; FOURIER TRANSFORMATION; IMAGE PROCESSING; IMAGE QUALITY; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY;

EID: 0031754964     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1998.4950200501     Document Type: Article

References (5)

1. Gonzalez RC, Woods RE: Digital Image Processing. Addison-Wesley Publishing Co., New York (1993) 81-128
2. Ong KH, Phang JHC, Thong JTL: A robust focusing and astigmatism correction method for the scanning electron microscope. Scanning 19, 553-563 (1997)
3. Ong KH, Phang JCH, Thong JTL: A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method. Scanning 20, 324-334 (1998)
4. Thong JTL, Li F: Eddy current compensation for magnetic electron lenses. Meas Sci Technol 7, 1583-1590 (1996)
5. Thong JTL, Li F: High-speed operation of scanning electron microscope lenses. Scanning 19, 275-280 (1997)