Measuring the proximity effects in laser pattern generation

Optical Engineering

Volumn 36, Issue 9, 1997, Pages 2508-2512

  Babin, Sergey ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

Lithography; Photomasks; Proximity effects

Indexed keywords

EID: 0343622445     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601479     Document Type: Article

References (20)

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