Microfabrication process using synchrotron radiation excited photodecomposition

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 64, Issue 7, 1998, Pages 1008-1011

  Katoh, Takanori ^a  

^a NONE

Author keywords

Aspect ratio; Etching; Micromachining; Synchrotron radiation (SR); Teflon PTFE

Indexed keywords

EID: 0343152539     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.64.1008     Document Type: Article

References (8)

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4. T. Katoh and Y. Zhang : Synchrotron Radiation Ablative Photodecomposition and Production of Crystalline Fluoropolymer Thin Films, Appl. Phys. Lett., 68, 6, (1996) 865.
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