Injection of self-interstitials during sputter depth profiling of Si at room temperature

Applied Physics Letters

Volumn 73, Issue 21, 1998, Pages 3088-3089

  Cardenas, J ^a   Svensson, B G ^a   Ni, W X ^b   Joelsson, K B ^b   Hansson, G V ^b  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343019807     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122681     Document Type: Article

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