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Volumn 15, Issue 6, 1997, Pages 2289-2292

Blanked aperture array for parallel electron beam lithography

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0342552572     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589631     Document Type: Article
Times cited : (5)

References (6)
  • 5
    • 4143093395 scopus 로고
    • Ph.D. Dissertation, Department of Electrical Engineering, Stanford University, CA
    • T. Neumann, Ph.D. Dissertation, Department of Electrical Engineering, Stanford University, CA, 1986.
    • (1986)
    • Neumann, T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.