Toward smart surfaces using high-density arrays of silicon-based mechanical oscillators

Journal of Intelligent Material Systems and Structures

Volumn 10, Issue 7, 1999, Pages 534-540

  Bourbon, Gilles ^a   Minotti, Patrice ^a   Hélin, Philippe ^b   Fujita, Hiroyuki ^c  

^a FEMTO ST INSTITUTE   (France)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c LIMMS/CNRS IIS Institute of Industrial Science University of Tokyo ^*

Author keywords

[No Author keywords available]

Indexed keywords

INTELLIGENT STRUCTURES; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; SEMICONDUCTING SILICON;

HIGH DENSITY ARRAYS; INTELLIGENT CONVEYANCE SYSTEMS; SILICON BASED MECHANICAL OSCILLATORS;

ACTUATORS;

EID: 0342472238     PISSN: 1045389X     EISSN: None     Source Type: Journal    
DOI: 10.1106/VDQ4-2EB9-TL7D-VQPV     Document Type: Article

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