Precise positioning of a micro conveyor based on superconducting magnetic levitation

MHS 1997 - Proceedings of 1997 International Symposium on Micromechatronics and Human Science

Volumn , Issue , 1997, Pages 131-135

  Iizuka, T ^a   Fujita, H ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONVEYORS; ELECTRODES; MAGNETIC ACTUATORS; MAGNETIC LEVITATION VEHICLES; MAGNETS;

'CURRENT; COPPER ELECTRODES; DRIVING CHARACTERISTICS; ELECTRODE LINE; MICRO CONVEYORS; PARTICLE GENERATION; POLYIMIDE FILM; PRECISE POSITIONING; SUPERCONDUCTOR Y; Y-BA-CU-O;

MAGNETIC LEVITATION;

EID: 0041756525     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.1997.768870     Document Type: Conference Paper

References (6)

1. Y.K. Kim M. Katsurai H. Fujita A Superconducting Actuator Using the Meissner Effect Sensors and Actuators 20 33 40 1989
2. Y. K. Kim M. Katsurai H. Fujita A superconducting actuator using Meissner effect Sensors and Actuators 40 1/2 33 40 1990
3. Y. K. Kim M. Katsurai H. Fujita A levitation-type linear synchronous micro actuator using the Meissner effect of high-Tc Superconductors Sensors and Actuators A-29 2 143 150 1991
4. Y. Maeda K. Aihara H. Fujita A Vacuum-compatible X-Y Micro actuator using the Levitational Effect of a Superconductor Proceedings of the IMACS/SICE International Symposium on Robotics, Mechatronics and Manufacturing Systems'92 623 628 Proceedings of the IMACS/SICE International Symposium on Robotics, Mechatronics and Manufacturing Systems'92 Kobe Japan 1992
5. T. Iizuka Y. Maeda K. Aihara H. Fujita A Micro X-Y-9 Conveyor by Superconducting Magnetic Levitation IEEE Symposium on Emerging Technologies and Factory Automation, ETFA'94 62 67 IEEE Symposium on Emerging Technologies and Factory Automation, ETFA'94 1994-November
6. T. Iizuka T. Masuda F. Hiroyuki Driving Characteristic of a Micro X-Y-9 Conveyor by Superconducting Magnetic Levitation The 8th Symposium on Electromagnetics and Dynamics 419 424 The 8th Symposium on Electromagnetics and Dynamics 1996-March