Transposed splitting of silicon implanted with spatially offset distributions of hydrogen and boron

Nuovo Cimento della Societa Italiana di Fisica D - Condensed Matter, Atomic, Molecular and Chemical Physics, Biophysics

Volumn 19, Issue 12, 1997, Pages 1871-1873

  Bower, R W ^a   LeBoeuf, L ^a   Albert Li, Y ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342291639     PISSN: 03926737     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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