Efficient production of silicon-on-insulator films by co-implantation of He+ with H+

IEEE International SOI Conference

Volumn , Issue , 1997, Pages 44-45

  Agarwal, Aditya ^a   Haynes, T E ^a   Venezia, V C ^a   Eaglesham, D J ^a   Weldon, M K ^a   Chabal, Y J ^a   Holland, O W ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PREPARATION; HELIUM; HYDROGEN; ION IMPLANTATION; OPTICAL MICROSCOPY; SILICON ON INSULATOR TECHNOLOGY; TRANSMISSION ELECTRON MICROSCOPY;

GAS IMPLANTS; SYNERGISTIC EFFECTS;

SEMICONDUCTING FILMS;

EID: 0031336301     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)