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Volumn , Issue , 1997, Pages 126-127
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Low temperature Si layer splitting
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
BORON;
CHEMICAL BONDS;
HYDROGEN;
ION IMPLANTATION;
LOW TEMPERATURE OPERATIONS;
QUARTZ;
SEMICONDUCTOR DOPING;
SILICON WAFERS;
LOW TEMPERATURE SILICON LAYER SPLITTING TECHNOLOGY;
SILICON ON INSULATOR TECHNOLOGY;
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EID: 0031383723
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (5)
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References (1)
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