Mechanical stress in and surrounding cosi2and tisi2lines

European Solid-State Device Research Conference

Volumn , Issue , 1996, Pages 609-612

  De Wolf, Ingrid ^a   Howard, David J ^a   Maex, Karen ^a   Maes, Herman E ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICAL STRESS;

EID: 0342280634     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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2. D.J. Howard, I. De Wolf, H. Bender and K. Maex. MRS Symp. Proc. Vol. 402,1996
3. I. De Wolf, D.J. Howard, K. Maex, and HE. Maes. MRS Symp. Proc. Vol. 427,1996
4. A. Lauwers, Q.F. Wang, B. Deweerdt, K. Maex. Applied Surface Science 91, p. 12,1995
5. S.M. Hu, Appl. Phys. Lett. 32(1), p. 5,1978
6. L De Wolf, S. Jones and H.E. Maes. J. Appl. Phys. 79(9), pp. 7148,1996