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Surface and Coatings Technology

Volumn 176, Issue 3, 2004, Pages 290-295

Effects of nitrogen flow on R.F. reactive magnetron sputtered silicon nitride films on high speed steel

(2) Yau, Bao Shun a Huang, Jow Lay a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

Author keywords

R.F. reactive magnetron sputtering; Silicon nitride films

Indexed keywords

COMPOSITION; ELASTIC MODULI; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; MICROSTRUCTURE; SHEAR STRESS; SILICON NITRIDE; STEEL;

HIGH SPEED STEEL;

COATINGS;

COATING; GAS FLOW; NITROGEN; SILICON NITRIDE; STEEL;

EID: 0242720913 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00768-0 Document Type: Article

Times cited : (16)

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