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Volumn 433-436, Issue , 2003, Pages 681-684
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Thermal Stability of Pd Schottky Contacts to p-Type 6H-SiC
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Author keywords
Contacts; Electrical Measurements; Hydrogen Passivation; Pd; SiC
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Indexed keywords
ANNEALING;
CARRIER CONCENTRATION;
ELECTRIC PROPERTIES;
LEAKAGE CURRENTS;
METALLIZING;
SCHOTTKY BARRIER DIODES;
THERMODYNAMIC STABILITY;
HYDROGEN PLASMAS;
SILICON CARBIDE;
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EID: 0242664955
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.433-436.681 Document Type: Conference Paper |
Times cited : (2)
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References (6)
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