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Volumn 13, Issue 40, 2001, Pages 9011-9017
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Hydrogen passivation and reactivation of the Al-acceptors in p-type 6H-SiC
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
CAPACITANCE MEASUREMENT;
CARRIER CONCENTRATION;
DISSOCIATION;
HYDROGEN;
PASSIVATION;
PLASMA APPLICATIONS;
REACTION KINETICS;
SCHOTTKY BARRIER DIODES;
THERMAL EFFECTS;
THERMODYNAMIC STABILITY;
VOLTAGE MEASUREMENT;
ALUMINUM ACCEPTORS;
HYDROGEN PASSIVATION;
HYDROGEN PLASMA TREATMENT;
NEAR SURFACE FREE CARRIER CONCENTRATION;
THERMAL REACTIVATION;
SEMICONDUCTING SILICON COMPOUNDS;
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EID: 0035828763
PISSN: 09538984
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-8984/13/40/317 Document Type: Article |
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Times cited : (13)
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References (12)
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