High aspect ratio etching by infrared laser induced micro bubbles

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 175-179

  Ohara, Junji ^a   Nagakubo, Masao ^a   Kawahara, Nobuaki ^a   Hattori, Tadashi ^a  

^a DENSO CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BUBBLES (IN FLUIDS); DENSITY OF LIQUIDS; IRRADIATION; LASER BEAM EFFECTS; LIQUIDS; METALS; NEODYMIUM LASERS; VISCOSITY OF LIQUIDS;

INERT LIQUID; INFRARED LASER ETCHING PROCESS; MICROBUBBLES;

ETCHING;

EID: 0030652707     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)