Fabrication and surface modification process for micro gas bearing

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 284-289

  Ota, Hitoshi ^a   Matsukawa, Kohei ^a   Takeda, Munehisa ^a   Ohara, Takao ^a   Narumiya, Hiromu ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; APPROXIMATION THEORY; ETCHING; FRICTION; LASER APPLICATIONS; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; SHAFTS (MACHINE COMPONENTS); TORQUE CONTROL; WEAR RESISTANCE;

HYDRODYNAMIC GAS BEARINGS; LASER ASSISTED ETCHING; SPIRAL GROOVES;

MINIATURE BEARINGS;

EID: 0031677949     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)