Mechanical and tribological properties of diamond-like carbon films deposited by electron cyclotron resonance microwave plasma chemical vapor deposition

Tribology Letters

Volumn 14, Issue 2, 2003, Pages 105-110

  Qi, Jun ^a   Luo, Jianbin ^a   Wang, Kunlin ^a   Wen, Shizhu ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Diamond like carbon; Mechanical properties; Tribology

Indexed keywords

DIAMOND-LIKE CARBON; FILM; HARDNESS; MECHANICAL PROPERTY; SLIDING FRICTION; TRIBOLOGY; WEAR RESISTANCE;

EID: 0242658807     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1021704320444     Document Type: Article

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