High-Q MEMS for wireless integrated circuits

5th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Service, TELSIKS 2001 - Proceedings of Papers

Volumn 1, Issue , 2001, Pages 203-209

  Lubecke, V M ^a   Barber, B P ^b   Fetter, L A ^b  

^a LUCENT TECHNOLOGIES   (United States)

^b AGERE SYSTEMS   (United States)

Author keywords

BAW; inductor; MEMS; micromechanical,acoustic; resonator; RFIC

Indexed keywords

ACOUSTICS; CABLES; ELECTRIC INDUCTORS; INTEGRATION; MEMS; MICROMECHANICAL RESONATORS; RESONATORS;

ACOUSTIC WAVE RESONATORS; BAW; HIGH FREQUENCY CHARACTERISTICS; INDUCTOR; MICRO-MECHANICAL; RFIC; SELF-ASSEMBLED INDUCTORS; WIRELESS INTEGRATED CIRCUITS;

BROADCASTING;

EID: 0242594020     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TELSKS.2001.954876     Document Type: Conference Paper

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