Self-assembling MEMS variable and fixed RF inductors

Asia-Pacific Microwave Conference Proceedings, APMC

Volumn , Issue , 2000, Pages 7-

  Lubecke, Victor M ^a   Barber, Bradley ^a   Chan, Edward ^a   Lopez, Daniel ^a   Gross, Mihal E ^a   Gammel, Peter ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC INDUCTORS; INDUCTANCE; INTEGRATED CIRCUIT MANUFACTURE; NATURAL FREQUENCIES; OPTIMIZATION; SELF ASSEMBLY; SILICON WAFERS;

FIXED RADIO FREQUENCY INDUCTORS; SELF RESONANCE FREQUENCY; WIRELESS FRONT END CIRCUITRY;

MICROELECTROMECHANICAL DEVICES;

EID: 0034461120     PISSN: None     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.963142     Document Type: Article

References (0)