Real-time monitoring of structure and stress evolution of boron films grown on Si(100) by ultrahigh vacuum chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 3, 1999, Pages 891-894

  Nesting, David C ^a   Kouvetakis, J ^a   Hearne, Sean ^b   Chason, E ^b,c   Tsong, I S T ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c BROWN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0242571566     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581661     Document Type: Article

References (12)

1. J. Als-Nielson, in Structure and Dynamics of Surfaces II, edited by W. Schommers and P. von Blanckenhagen (Springer, Berlin, 1986), Vol. 43, p. 181.
2. E. Chason and T. M. Mayer, CRC Crit. Rev. Solid State Mater. Sci. 22, 1 (1997).
3. E. Chason and M. Chason, J. Vac. Sci. Technol. A 12, 1565 (1994).
4. E. Chason and D. T. Warwick, Mater. Res. Soc. Symp. Proc. 208, 351 (1991).
5. MOSS system designed and supplied by k-Space Associates, Inc., Ann Arbor, MI.
6. G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909).
7. J. A. Floro, E. Chason, S. R. Lee, R. D. Twesten, R. Q. Hwang, and L. B. Freund, J. Electron. Mater. 26, 969 (1997).
8. J. A. Floro, E. Chason, S. R. Lee, and G. A. Petersen, Appl. Phys. Lett. 71, 1694 (1997).
9. J. A. Floro, E. Chason, and S. R. Lee, Mater. Res. Soc. Symp. Proc. 406, 491 (1996).
10. J. A. Floro and E. Chason, Appl. Phys. Lett. 69, 3830 (1996).
11. H. Werheit, A. Hausen, and H. Binnenbruck, Phys. Status Solidi 42, K57 (1970).
12. L. G. Parratt, Phys. Rev. 95, 359 (1954).