Modelling of relief of phase reflection diffraction grating

Applied Mathematical Modelling

Volumn 27, Issue 12, 2003, Pages 1035-1049

  Margelevičius, Mindaugas ^a   Grigaliunas, Viktoras ^b   Pranevičius, Henrikas ^a   Margelevičius, Juozas ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Diffraction grating; Diffractive optical element; Fourier optics; Levenberg Marquardt

Indexed keywords

ELECTROMAGNETIC DISPERSION; FOURIER OPTICS; MATHEMATICAL MODELS;

PHASE REFLECTION;

DIFFRACTION GRATINGS;

MODELING;

EID: 0242490674     PISSN: 0307904X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0307-904X(03)00137-9     Document Type: Article

References (25)

1. Mittleman D.M. Bertone J.F. Jiang P., et-al. Optical properties of planar colloidal crystals: dynamical diffraction and the scalar wave approximation J. Phys. Chem 111 1 1999 345-354
2. Grigaliunas V. Kopustinskas V. Meskinis S. Margelevicius M. Mikulskas I. Tomasiunas R. Replication technology for photonic band gap crystals Opt. Mater. 17 1-2 2001 15-18
3. Kopustinskas V. Grigaliunas V. Jucius D. Meskinis S. Margelevicius M. Tomasiunas R. α-C:H Films for photonic structures fabrication Proc. SPIE 4318 2001 295-300
4. 6 reactive ion beam etching Lithuanian J. Phys. 40 1-3 2000 140-143
5. Kallioniemi I. Saarinen J. Oja E. Optical scatterometry of subwavelength diffraction gratings: neural network approach Appl. Opt. 37 1998 5830-5835
6. I. Kallioniemi, J. Saarinen, E. Oja, Extraction of opto-geometrical properties of gratings from scattering data by means of the neural network, in: Diffractive Optics '97 12, EOS Topical Meetings Digest Series, 1997, pp. 202-203
7. Davidson M. Sullivan N. Monte Carlo simulation for CD SEM calibration and algorithm development Proc. SPIE 2439 1995 334-344
8. Davidson M. Vladar A. Inverse scattering approach to SEM linewidth measurements Proc. SPIE 3677 1999 640-649
9. Content D. Diffraction grating groove analysis used to predict efficiency and scatter performance Proc. SPIE 3778 1999 19-30
10. Goray L.I. Modified integral method for weak convergence problems of light scattering on relief grating Proc. SPIE 4291 2001 1-12
11. Turunen J. Diffraction theory of microrelief gratings Herzig H.P. Micro-Optics: Elements, Systems and Application 1997 31-52 Taylor - Francis London
12. Russian Source, 1988
13. (Eds.), Moscow Russian Source, 1982, pp. 143-172
14. Bolotovskii B.M. Galst'yan E.A. Diffraction and diffraction radiation Phys.-Usp. 43 8 2000 755-775
15. Comastri S.A. Simon J.M. Blendowske R. Generalized sine condition for image-forming systems with centering errors J. Opt. Soc. Am. A 16 3 1999 602-612
16. Heyman E. Melamed T. Space-time representation of ultra wideband signals Hawkes P.W. Advances in Imaging and Electron Physics vol. 103 1998 1-63 Academic Press New York
17. Duffieux P.M. The Fourier Transform and its Applications to Optics second ed. 1983 Wiley New York
18. Yetik I.S. Ozaktas H.M. Barshan B., et-al. Perspective projections in the space-frequency plane and fractional Fourier transforms J. Opt. Soc. Am. A 17 12 2000 2382-2390
19. Hayaka, Moscow Russian Source, 1979
20. et al., 13 (1) (1984) 64-73 Russian Source
21. Leningrad (St. Peterburg), 1986 Russian Source
22. Margelevicius M. Grigaliunas V. Pranevicius H. Modeling of lamellar transmission diffraction grating by solving the reverse diffraction problem Inform. Technol. Contr. 18 1 2001 52-59
23. Moscow Russian Source, 1982, pp. 113-142
24. Tarantola A. Inverse Problem Theory: Methods for Data Fitting and Model Parameter Estimation 1987 Elsevier Amsterdam
25. Trujillo D.M. Busby H.R. Practical Inverse Analysis in Engineering 1997 CRC Press Boca Raton, FL