MEMS-fabricated ICPF microactuators for biological manipulation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5051, Issue , 2003, Pages 332-337

  Zhou, Wenli ^a   Li, Wen J ^a,b   Mai, John D ^c  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b SHENYANG INSTITUTE OF AUTOMATION   (China)

^c Microwave Bonding Instruments Inc   (United States)

Author keywords

Biological micromanipulation; Ionic conducting polymer film (ICPF); Polymer micro actuator

Indexed keywords

CONDUCTIVE PLASTICS; ELECTRIC POTENTIAL; ELECTROLYSIS; ELECTROMAGNETS; PHOTOLITHOGRAPHY; PLASTIC FILMS;

IONIC CONDUCTING POLYMER FILMS (ICPF);

MICROACTUATORS;

EID: 0242441947     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.484387     Document Type: Conference Paper

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