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Volumn 2, Issue , 2001, Pages 1814-1817
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Metal-arc-plasma ion implantation of materials used in aerospace applications
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Author keywords
[No Author keywords available]
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Indexed keywords
AEROSPACE APPLICATIONS;
AEROSPACE MATERIALS;
ION BEAMS;
IONIZATION;
IONS;
METALS;
PLASMA APPLICATIONS;
SILICON WAFERS;
SURFACE TREATMENT;
VACUUM APPLICATIONS;
HIGH DENSITY PLASMAS;
HIGH-IONIZATION;
IMPLANTATION PROCESS;
ION BEAM IMPLANTATION;
METALLIC IONS;
PLASMA IMMERSION ION IMPLANTATION;
SURFACE PROCESSING;
VACUUM ARCS;
ION IMPLANTATION;
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EID: 0242372541
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/PPPS.2001.1001926 Document Type: Conference Paper |
Times cited : (2)
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References (6)
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