Metal-arc-plasma ion implantation of materials used in aerospace applications

PPPS 2001 - Pulsed Power Plasma Science 2001

Volumn 2, Issue , 2001, Pages 1814-1817

  Ueda, M ^a   Dallaqua, R S ^a   Rossi, J O ^a   Tan, I H ^a   Abramof, E ^a   Beloto, A F ^a   Del Bosco, E ^a  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSPACE APPLICATIONS; AEROSPACE MATERIALS; ION BEAMS; IONIZATION; IONS; METALS; PLASMA APPLICATIONS; SILICON WAFERS; SURFACE TREATMENT; VACUUM APPLICATIONS;

HIGH DENSITY PLASMAS; HIGH-IONIZATION; IMPLANTATION PROCESS; ION BEAM IMPLANTATION; METALLIC IONS; PLASMA IMMERSION ION IMPLANTATION; SURFACE PROCESSING; VACUUM ARCS;

ION IMPLANTATION;

EID: 0242372541     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PPPS.2001.1001926     Document Type: Conference Paper

References (6)

1. J. R. Conrad, J. L. Radtke, RA. Dodd, F. J. Worzala and N. C. Trail, "Plasma source ion-implantation technique for surface modification of materials", Journal Applied of Physics, vol. 62(11), pp. 4591-4596, Dec. 1997.
2. 2] M. Ueda, L. A. Berni, J. O. Rossi, J. J. Barroso, G. F. Gomes, A. F. Beloto and E. Abramof., "Plasma immersion ion implantation at the Institute Nacional de Pesquisas Espaciais (INPE), Brazil", Surface and Coatings Technology, vol. 136(1-3), pp, 28-31, Feb. 2001.
3. I. G. Brown, A. Anders, M. R. Dickinson, R. A. MacGill and O. R. Monteiro, "Recent advances in surface processing with metal plasma and ion beams", Surface and Coatings Technology, vol. 112(1-3), pp 271-277, Feb. 1999.
4. Z. A. Iskanderova, J. I. Kleiman, Yu. Gudimenko, W. D. Morison, R. C. Tenyson. In Protection of Materials and Structures from the Low Earth Orbit Space Environment, J. I. Kleiman and R. C. Tennyson (Editors), Kluwer (1993) 225.
5. R. S. Dallaqua, E. Del Bosco, R. P. da Silva and S. W. Simpson, "Langmuir probe measurements in a vacuum arc plasma centrifuge", IEEE Transactions on Plasma Science, vol. 26, no. 3, pp. 1044-1051, June 1998.
6. J. O. Rossi, M. Ueda and JJ. Barroso, "Plasma immersion ion implantation experiments with long and short rise time pulses using high voltage hard tube pulser", Surface and Coatings Technology, vol. 136(1-3), pp. 43-46, Feb. 2001.