Thermoelastic coupling effect on a micro-machined beam resonator

Mechanics Research Communications

Volumn 30, Issue 6, 2003, Pages 513-518

  Guo, F L ^a   Rogerson, G A ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Frequency shift; Micro machined resonator; Thermo elasticity

Indexed keywords

DAMPING; ELASTIC MODULI; EQUATIONS OF MOTION; HEAT CONDUCTION; INTEGRATION; MATHEMATICAL MODELS; MATHEMATICAL TRANSFORMATIONS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; RESONATORS; THERMAL CONDUCTIVITY OF SOLIDS; VIBRATIONS (MECHANICAL);

AIR-DAMPING; FREQUENCY SHIFT RATIO; MICRO-MACHINED RESONATOR; THERMAL MODULUS; THERMOELASTIC COUPLING EFFECT;

THERMOELASTICITY;

EID: 0242292023     PISSN: 00936413     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0093-6413(03)00061-2     Document Type: Article

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