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Volumn 16, Issue 3, 2001, Pages 633-643

Deposition of epitaxial transition metal carbide films and superlattices by simultaneous direct current metal magnetron sputtering and C60 evaporation

(5) Hogberg H a Birch, J b Johansson, M P b Hultman, L b Jansson, U a

a UPPSALA UNIVERSITY (Sweden)

b LINKÖPING UNIVERSITY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CARBIDES; CARBON; DEPOSITION; EPITAXIAL GROWTH; EVAPORATION; MAGNETRON SPUTTERING; TRANSITION METAL COMPOUNDS;

METAL MAGNETRON SPUTTERING; PLASMA-ASSISTED DEPOSITION;

THIN FILMS;

EID: 0035295314 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0094 Document Type: Article

Times cited : (14)

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